Monosilane is a chemical compound that is used in the electronics industry as a precursor for the deposition of silicon thin films. It is also referred to as silane, silicon tetrahydride, and silicon hydride, which are synonyms for the same chemical compound. The molecular formula for monosilane is SiH4, which indicates that it has one silicon atom and four hydrogen atoms. Other synonyms for monosilane derived from its molecular formula include silicoethane, silicomethane, and silicon tetrahydrido. As a gas, monosilane can cause serious health hazards, making it essential to follow proper safety protocols when working with this chemical.